EECS 179: Introduction to MEMS

Fall 2008 Lecture schedule

Lectures are available for download. You will need Acrobat Reader to read the files.

SYLLABUS

MON, 9/29/2008 Lecture 01 (notes)Introduction: Engineering the Microworld
WED, 10/1/2008 Lecture 02 (notes)Manufacturing overview
FRI, 10/3/2008 Lecture 03 (notes)Bulk micromachining
MON, 10/6/2008 (notes)N/A
WED, 10/8/2008 (notes)N/A
FRI, 10/10/2008 (notes)N/A
MON, 10/13/2008 Lecture 04 (notes)Surface micromachining
WED, 10/15/2008 Lecture 05 (notes)Non-traditional manufacturing techniques
FRI, 10/17/2008 Lecture 06 (notes)Alternative manufacturig / packaging
MON, 10/20/2008 Quiz 01 (notes)Quiz #1, covers lectures 1-6
WED, 10/22/2008 Lecture 07 (notes)Introduction to sensors and actuators
FRI, 10/24/2008 Lecture 08 (notes)Strain, pressure and acoustic sensors
MON, 10/27/2008 Lecture 09 (notes)MEMS accelerometers
WED, 10/29/2008 Lecture 10 (notes)MEMS gyroscopes
FRI, 10/31/2008 Lecture 11 (notes)Micro-actuators
MON, 11/3/2008 Quiz 02 (notes)Quiz #2, lectures 7-11 and reading assignments
WED, 11/5/2008 Lecture 12 (notes)Miniaturization in the Life sciences
FRI, 11/7/2008 Lecture 13 (notes)Microfluidics
MON, 11/10/2008 Lecture 14 (notes)Nanovolume chemistry
WED, 11/12/2008 Lecture 15 (notes)Miniaturization in Biomedical Technologies
FRI, 11/14/2008 Lecture 16 (notes)Neural devices and electrodes
MON, 11/17/2008 Lecture 17 (notes)Drug delivery, minimally invasive technology, and other small stuff
WED, 11/19/2008 Lecture 18 (notes)Introductory lecture: Optical MEMS
FRI, 11/21/2008 Lecture 19 (notes)Photonic devices and imagers
MON, 11/24/2008 Quiz 03 (notes)Quiz #3, lectures 12-17 and reading assignments
WED, 11/26/2008 Lecture 20 (notes)Wireless devices
FRI, 11/28/2008 No class (notes)Thanksgiving Holiday
MON, 12/1/2008 Quiz 04 (notes)Quiz #4, lectures 18-20 and reading assignments
WED, 12/3/2008 Lecture 21 (notes)The New MEMS and other topics
FRI, 12/5/2008 Lecture 22 (notes)Review for final exam. Research paper due by 12:00 midnight, Saturday night
MON, 12/8/2008 Final Exam (notes)Final Exam, comprehensive (1:30-3:30)

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