IMPORTANT NOTICE

Please come to class on Monday! I will describe how we are going to make up for the missed week.

EECS 179: Introduction to MEMS

Fall 2008

ENG EECS 179, 18260
18260 Lec A 4 BACHMAN, M. MWF 12:00-12:50p ICF 102

Instructor: Mark Bachman (mbachman@uci.edu)
Office hours: M/W 1:00-2:00 PM EGW 2227
and by appiontment

TA: None assigned to this class

Class location: ICF 102
Interim Classroom Facility (ICF) 102, Bldg. 315
Time: 12:00 - 12:50, MWF
Book: An Introduction to Microelectromechanical Systems Engineering, 2nd Edition
(Artech House Mems Library) by Nadim Maluf

Website: www.li-bachman.net/eecs179

Syllabus 2008

Course Description

Course objectives: This is a survey course covering the exciting interdisciplinary field of microengineering, popularly referred to as "MEMS" (microelectrical mechanical systems). We will discuss the nature of engineering at the microscale, manufacturing and design techniques, microdevice applications, issues concerning MEMS commercialization, and future trends. We will explore these issues through three target industries currently of relevance to MEMS: sensor devices, biomedical devices, and telecommunication devices. The field of microscale engineering is highly interdisciplinary, drawing from all major technical fields, including physics, chemistry, biology, and materials science. No one course can probe this field in great depth. However, it is hoped that, upon completion of this course, the student will draw enough understanding about micrengineering to confidently enter or follow the field.

Note from instructor: MEMS and microengineering is a wide open field right now, with plenty of opportunities for talented engineers and scientists who wish to do pioneering work. If we are successful in this course, you'll know what this field is all about, and you'll be as excited about microengineering as I am.

Prerequisites: This is a upper-division course in electrical engineering, but is open to students from all science and engineering backgrounds. Students should have a good understanding of engineering principles and basic physics. Some problem solving will be required on the quizzes. See me if you have questions about adding the course.

Course outcomes: After completion of this course, students should be able (1) to describe current and emerging manufacturing techniques for MEMS; (2) to describe examples of MEMS devices in industries such as automotive, aerospace, biotechnology telecommunications, and fiber-optic communications; (3) to describe the electronic, physical and chemical principles involved in the successful operation of a wide variety of MEMS devices; (4) to intelligently discuss issues relating to the design and implementation of MEMS devices, including the strengths and weaknesses of MEMS applications; (5) to discuss market forces that drive the development of MEMS devices and technology.